Concept of novel CVD diamond high voltage, high power and study of ohmic contacts on diamond

G. Civrac (1) , Henri Schneider (2, 3) , P. Bergonzo (4) , M. Nesladek (5, 6) , Thierry Camps (7)

1 LEEI - Laboratoire électrotechnique et électronique industrielle
2 Fraunhofer ICT - Fraunhofer Institute for Chemical Technology
3 LAPLACE-GENESYS - Groupe ENergie Electrique et SYStémique
4 LCD (CEA, LIST) - Laboratoire Capteurs Diamant (CEA, LIST)
5 Institute for Materials Research [Diepenbeek]
6 IMEC - Interuniversity Microelectronics Centre - Institut de micro-électronique et composants [Belgique]
7 LAAS - Laboratoire d'analyse et d'architecture des systèmes

Diamond exceptional electronic and thermal properties make it a very promising material for future applications in power electronics, especially for high voltage and/or high temperature applications. In this paper, the principle of high power, high voltage switches that take advantage of these properties are illustrated by simulations. Technological steps necessary to their fabrication have been developed. We present heavily B-doped layers, the way we characterized them and ohmic contacts deposited on them.

Mots clés: Power electronics; High voltage; Ohmic contacts; Diamond; Chemical Vapor Deposition (CVD); thin film; instrumentation; boron-doped diamond

Domaines: Micro et nanotechnologies/Microélectronique; Science des matériaux [cond-mat.mtrl-sci]; Electronique

G. Civrac, Henri Schneider, P. Bergonzo, M. Nesladek, Thierry Camps. Concept of novel CVD diamond high voltage, high power and study of ohmic contacts on diamond. EPE 2007: 12th European Conference on Power Electronics and Applications, Aalborg, Denmark, IEEE, Sep 2007, Aalborg, Denmark. pp.4417571, ⟨10.1109/EPE.2007.4417571⟩. ⟨hal-03877113⟩