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Conference papers
Detecting volatile organic compounds using a resonant microcantilever-based system
Abstract : This paper presents a system based on an array of eight micro-cantilevers for volatile organic compounds (VOC) detection. Sensors based on a micromechanical array of silicon and diamond cantilevers are sensitized for the detection of analytes using polymer coatings. Connections to the sensors are not permanent and they can be easily changed for another application or for maintenance. Detections of VOCs are demonstrated.
Keywords :
Microcantilever
Sensor
volatile organic compound (VOC)
Polymer
Surface treatment
Fabrication
Sensor arrays
cantilevers
chemical sensors
diamond
microsensors
organic compounds
volatile organic compounds
silicon cantilever
diamond cantilever
polymer coatings
resonant microcantilever-based system
polymer films
silicon
VOC detection
https://hal-cea.archives-ouvertes.fr/cea-01913396
Contributor : Marie-France Robbe <>
Submitted on : Tuesday, November 6, 2018 - 11:43:40 AM
Last modification on : Saturday, May 1, 2021 - 3:49:56 AM
Contributor : Marie-France Robbe <>
Submitted on : Tuesday, November 6, 2018 - 11:43:40 AM
Last modification on : Saturday, May 1, 2021 - 3:49:56 AM