Detecting volatile organic compounds using a resonant microcantilever-based system - Archive ouverte HAL Access content directly
Conference Papers Year : 2016

Detecting volatile organic compounds using a resonant microcantilever-based system

(1) , (1) , (1) , (1) , (2) , (2)
1
2

Abstract

This paper presents a system based on an array of eight micro-cantilevers for volatile organic compounds (VOC) detection. Sensors based on a micromechanical array of silicon and diamond cantilevers are sensitized for the detection of analytes using polymer coatings. Connections to the sensors are not permanent and they can be easily changed for another application or for maintenance. Detections of VOCs are demonstrated.
Not file

Dates and versions

cea-01913396 , version 1 (06-11-2018)

Identifiers

Cite

Maira Possas Abreu, Farbod Ghassemi, Lionel Rousseau, Gaelle Bazin Lissorgues, Massiel Habchi, et al.. Detecting volatile organic compounds using a resonant microcantilever-based system. 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, Hungary. pp.7514883, ⟨10.1109/DTIP.2016.7514883⟩. ⟨cea-01913396⟩
95 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More