Detecting volatile organic compounds using a resonant microcantilever-based system

Abstract : This paper presents a system based on an array of eight micro-cantilevers for volatile organic compounds (VOC) detection. Sensors based on a micromechanical array of silicon and diamond cantilevers are sensitized for the detection of analytes using polymer coatings. Connections to the sensors are not permanent and they can be easily changed for another application or for maintenance. Detections of VOCs are demonstrated.
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https://hal-cea.archives-ouvertes.fr/cea-01913396
Contributor : Marie-France Robbe <>
Submitted on : Tuesday, November 6, 2018 - 11:43:40 AM
Last modification on : Monday, May 13, 2019 - 11:15:31 AM

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Maira Possas Abreu, Farbod Ghassemi, Lionel Rousseau, Gaelle Lissorgues, Massiel Habchi, et al.. Detecting volatile organic compounds using a resonant microcantilever-based system. 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, Hungary. pp.7514883, ⟨10.1109/DTIP.2016.7514883⟩. ⟨cea-01913396⟩

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