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Detecting volatile organic compounds using a resonant microcantilever-based system

Maira Possas Abreu 1 Farbod Ghassemi 1 Lionel Rousseau 1 Gaelle Lissorgues 1 Massiel Habchi 2 Emmanuel Scorsone 2
1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 LCD-LIST - Laboratoire Capteurs Diamant
DM2I - Département Métrologie Instrumentation & Information : DRT/LIST/DM2I
Abstract : This paper presents a system based on an array of eight micro-cantilevers for volatile organic compounds (VOC) detection. Sensors based on a micromechanical array of silicon and diamond cantilevers are sensitized for the detection of analytes using polymer coatings. Connections to the sensors are not permanent and they can be easily changed for another application or for maintenance. Detections of VOCs are demonstrated.
Keywords : Microcantilever Sensor volatile organic compound (VOC) Polymer Surface treatment Fabrication Sensor arrays cantilevers chemical sensors diamond microsensors organic compounds volatile organic compounds silicon cantilever diamond cantilever polymer coatings resonant microcantilever-based system polymer films silicon VOC detection
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Conference papers
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https://hal-cea.archives-ouvertes.fr/cea-01913396
Contributor : Marie-France Robbe <>
Submitted on : Tuesday, November 6, 2018 - 11:43:40 AM
Last modification on : Tuesday, June 2, 2020 - 7:36:04 AM

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CEA | ESIEE-PARIS | CNAM | UPEC-UPEM | CEA-UPSAY | DRT | LIST | UNIV-PARIS-SACLAY | UNIV-HESAM | DM2I | ESYCOM

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Maira Possas Abreu, Farbod Ghassemi, Lionel Rousseau, Gaelle Lissorgues, Massiel Habchi, et al.. Detecting volatile organic compounds using a resonant microcantilever-based system. 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, Hungary. pp.7514883, ⟨10.1109/DTIP.2016.7514883⟩. ⟨cea-01913396⟩

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