Detecting volatile organic compounds using a resonant microcantilever-based system

Maira Possas Abreu 1 Farbod Ghassemi 1 Lionel Rousseau 1 Gaelle Lissorgues 1 Massiel Habchi 2 Emmanuel Scorsone 2
1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 LCD-LIST - Laboratoire Capteurs Diamant
DM2I - Département Métrologie Instrumentation & Information : DRT/LIST/DM2I
Abstract : This paper presents a system based on an array of eight micro-cantilevers for volatile organic compounds (VOC) detection. Sensors based on a micromechanical array of silicon and diamond cantilevers are sensitized for the detection of analytes using polymer coatings. Connections to the sensors are not permanent and they can be easily changed for another application or for maintenance. Detections of VOCs are demonstrated.
Keywords : resonant microcantilever-based system polymer films silicon VOC detection polymer coatings diamond cantilever silicon cantilever volatile organic compounds organic compounds microsensors diamond chemical sensors cantilevers Sensor arrays Fabrication Surface treatment Polymer volatile organic compound (VOC) Sensor Microcantilever
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Conference papers
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https://hal-cea.archives-ouvertes.fr/cea-01913396
Contributor : Marie-France Robbe <>
Submitted on : Tuesday, November 6, 2018 - 11:43:40 AM
Last modification on : Monday, May 13, 2019 - 11:15:31 AM

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CEA | ESIEE-PARIS | UPEC-UPEM | CEA-UPSAY | DRT | LIST | UNIV-PARIS-SACLAY | UNIV-HESAM | DM2I

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Maira Possas Abreu, Farbod Ghassemi, Lionel Rousseau, Gaelle Lissorgues, Massiel Habchi, et al.. Detecting volatile organic compounds using a resonant microcantilever-based system. 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, Hungary. pp.7514883, ⟨10.1109/DTIP.2016.7514883⟩. ⟨cea-01913396⟩

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