Detecting volatile organic compounds using a resonant microcantilever-based system

Maira Possas Abreu (1) , Farbod Ghassemi (1) , Lionel Rousseau (1) , Gaelle Bazin Lissorgues (1) , Massiel Habchi (2) , Emmanuel Scorsone (2)

1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 LCD (CEA, LIST) - Laboratoire Capteurs Diamant (CEA, LIST)

This paper presents a system based on an array of eight micro-cantilevers for volatile organic compounds (VOC) detection. Sensors based on a micromechanical array of silicon and diamond cantilevers are sensitized for the detection of analytes using polymer coatings. Connections to the sensors are not permanent and they can be easily changed for another application or for maintenance. Detections of VOCs are demonstrated.

Mots clés: Polymer; volatile organic compound (VOC); Surface treatment; Fabrication; Sensor arrays; cantilevers; chemical sensors; diamond; microsensors; organic compounds; volatile organic compounds; silicon cantilever; diamond cantilever; polymer coatings; VOC detection; resonant microcantilever-based system; polymer films; silicon; Microcantilever; Sensor

Domaines: Instrumentations et Détecteurs [physics.ins-det]; Micro et nanotechnologies/Microélectronique; Chimie analytique; Electromagnétisme; Matériaux; Biomatériaux

Maira Possas Abreu, Farbod Ghassemi, Lionel Rousseau, Gaelle Bazin Lissorgues, Massiel Habchi, et al.. Detecting volatile organic compounds using a resonant microcantilever-based system. 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, Hungary. pp.7514883, ⟨10.1109/DTIP.2016.7514883⟩. ⟨cea-01913396⟩