Study of the formation and degradation of intermetallics formed by solid-state reaction of Ni on InGaAs

Seifeddine Zhiou (1) , Thanh Tra Nguyen (2) , Philippe Rodriguez (1) , Fabrice Nemouchi (1) , Patrice Gergaud (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 NEEL - CRG - CRG & Grands instruments

Domaines: Micro et nanotechnologies/Microélectronique

Seifeddine Zhiou, Thanh Tra Nguyen, Philippe Rodriguez, Fabrice Nemouchi, Patrice Gergaud. Study of the formation and degradation of intermetallics formed by solid-state reaction of Ni on InGaAs. Materials for Advanced Metallization Conference (MAM 2016), Mar 2016, Bruxelles, Belgium. ⟨cea-01615684⟩