Methodology and software tool for focal spot characterization of X-ray micro- and nano- focus tubes

Méthodes et outil logiciel de caractérisation de la tache focale des générateurs RX de type micro et nano foyer

Marius Costin (1) , Anthony Touron (1)

1 LCIM (CEA, LIST) - Laboratoire Capteurs et Instrumentation pour la Mesure (CEA, LIST)

This article presents a brief overview of a methodology, numerical algorithms and their implementation for the evaluation of the focal spot size and shape of X-ray sources with spot sizes inferior to 5 µm. The work has been carried out within the framework of the NanoXSpot project. The main outcomes are proposals for revisions and new parts of EN 12543 standard, a new design and implementation of a gauge and a reference implementation of the algorithms on a stand alone software tool. Within this contribution, we focus on the software tool, through evaluations on simulated and experimental images as part of the validation procedure.

Mots clés: ionizing radiation; X-rays; modelling; standardization; simulation; gauge; sensor; radioactive source; radioactivity; NxS software tool

Domaines: Traitement des images [eess.IV]; Instrumentations et Détecteurs [physics.ins-det]; Imagerie

Marius Costin, Anthony Touron. Méthodes et outil logiciel de caractérisation de la tache focale des générateurs RX de type micro et nano foyer. Journées COFREND 2023, Jun 2023, Marseille, France. ⟨cea-04410147⟩