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Développement de l'ablation laser en champ proche couplée à l'ICPMS pour l'analyse sub-micrométrique d'échantillons solides

Chirelle Jabbour 1 
1 LANIE - Laboratoire de développement Analytique Nucléaire Isotopique et Elémentaire
SEARS - Service d'études analytiques et de réactivité des surfaces : DEN/DPC
Abstract : A near field laser ablation method was developed for chemical analysis of solid samples at sub-micrometric scale. This analytical technique combines a nanosecond laser Nd:YAG, an Atomic Force Microscope (AFM), and an inductively coupled plasma mass spectrometer (ICPMS). In order to improve the spatial resolution of the laser ablation process, the nearfield enhancement effect was applied by illuminating, by the laser beam, the apex of the AFM conductive sharp tip maintained at a few nanometers (5 to 30 nm) above the sample surface. The interaction between the illuminated tip and the sample surface enhances locally the incident laser energy and leads to the ablation process. By applying this technique to conducting gold and tantalum samples, and semiconducting silicon sample, a lateral resolution of 100 nm and depths of a few nanometers were demonstrated. Two home-made numerical codes have enabled the study of two phenomena occurring around the tip: the enhancement of the laser electrical field by tip effect, and the induced laser heating at the sample surface. The influence of the main operating parameters on these two phenomena, amplification and heating, was studied. An experimental multi-parametric study was carried out in order to understand the effect of different experimental parameters (laser fluence, laser wavelength, number of laser pulses, tip-to-sample distance, sample and tip nature) on the near-field laser ablation efficiency, crater dimensions and amount of ablated material. The experimental results obtained in terms of crater sizes are in good agreement with the theoretical results of these codes. Finally, preliminary offline analyses of the ablated material were carried out by ICPMS. The first characterization tests by transmission electron microscopy of the ablated particles showed gold nanoparticles with diameter ranging between 50 and 200 nm.
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Submitted on : Friday, December 9, 2016 - 10:19:59 AM
Last modification on : Monday, December 13, 2021 - 9:14:37 AM
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  • HAL Id : tel-01412949, version 1


Chirelle Jabbour. Développement de l'ablation laser en champ proche couplée à l'ICPMS pour l'analyse sub-micrométrique d'échantillons solides . Chimie. Université Pierre & Marie Curie - Paris 6, 2016. Français. ⟨tel-01412949⟩



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