Highly transparent piezoelectric PZT membranes for transducer applications

Franklin Pavageau (1) , Christel Dieppedale (1) , Pierre Perreau (1) , Romain Liechti (1) , Antoine Hamelin (1) , Christophe Licitra (2) , Fabrice Casset (1) , Gwenael Le Rhun (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 DPFT - Département Plate-Forme Technologique

Transparent PZT-based membranes were fabricated out of 200 mm silicon wafers thanks to an innovative layer transfer process. The ITO (100 nm)/PZT (1.16 μm)/ITO (150 nm)/SiO2 (8.7 μm) membrane stack shows an average transmission of about 75 % in the visible spectrum. PZT film is highly (100) oriented and measured capacitors exhibit ferroelectric, dielectric and piezoelectric properties comparable to standard non-transparent PZT with metal electrodes. Piezoelectric actuation under applied voltage was verified through both static deflection and acoustic measurements. This first proof of concept opens the way to the fabrication of transparent piezoelectric transducers such as transparent PMUT devices.

Domains: Chemical Sciences; Material chemistry; Physics [physics]

Franklin Pavageau, Christel Dieppedale, Pierre Perreau, Romain Liechti, Antoine Hamelin, et al.. Highly transparent piezoelectric PZT membranes for transducer applications. Sensors and Actuators A: Physical , 2022, https://doi.org/10.1016/j.sna.2022.113866. ⟨cea-03791813⟩