High power 2.5D integrated thermoelectric generators combined with microchannels technology

Guillaume Savelli (1) , Jean-Philippe Colonna (2) , Perceval Coudrain (2) , Pascal Faucherand (1) , Agnes Royer (2) , Louis-Michel Collin (3, 4, 5) , Amrid Amnache (3, 4, 5) , Luc Frechette (3, 4, 5)

1 DTNM - Département des Technologies des Nouveaux Matériaux (Ex Département des Technologies des NanoMatériaux)
2 DCOS - Département Composants Silicium
3 UdeS - Université de Sherbrooke
4 LN2 - Laboratoire Nanotechnologies et Nanosystèmes [Sherbrooke]
5 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]

We have developed high power integrated thermoelectric generators (µTEGs). These µTEGs are CMOS compatible, i.e. based on polycristalline SiGe materials. These µTEGs have been processed directly on a silicon interposer. Even if poly-SiGe exhibits low thermoelectric performances at room temperature, the specific design and proposed architecture enable µTEGs to deliver up to 680 µW for a temperature difference at 15.5 K. To reach such high power, an original 2.5D structure has been developed and µchannels technology has been associated, below the µTEG, to dissipate heat coming from the hot side. µTEGs have been tested in real environment, located below a hot test chip. Such µTEG performances overtake those from similar state-of-the-art CMOS compatible devices, and pave the way for a potential use in different applications such as sensors power supply or battery charger.

Mots clés: thermoelectric generators; energy harvesting; SiGe; microchannel; CMOS compatible

Domaines: Micro et nanotechnologies/Microélectronique; Energie électrique

Guillaume Savelli, Jean-Philippe Colonna, Perceval Coudrain, Pascal Faucherand, Agnes Royer, et al.. High power 2.5D integrated thermoelectric generators combined with microchannels technology. Energy, 2022, 252, pp.123984. ⟨10.1016/j.energy.2022.123984⟩. ⟨cea-03790844⟩