Dry etching study of 3D Grayscale micrometric patterns into a polymer layer

Assia Selmouni (1) , Aurélien Tavernier (1) , Sébastien Bérard-Bergery (1) , Nicolas Posseme (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Domains: Physics [physics]; Micro and nanotechnologies/Microelectronics; Engineering Sciences [physics]; Plasmas; Materials

Assia Selmouni, Aurélien Tavernier, Sébastien Bérard-Bergery, Nicolas Posseme. Dry etching study of 3D Grayscale micrometric patterns into a polymer layer. MNE2022 Eurosensors - PESM Workshop, Micro and Nano Engineering, Sep 2022, Leuven, Belgium. ⟨cea-03773457⟩