Key low temperature processes for a silicon-based 3D sequential integration
Xavier Garros
(1)
,
Perrine Batude
(1)
,
Claire Fenouillet-Beranger
,
Laurent Brunet
(1)
,
Camila Calvacante
,
Tadeu Mota Frutuoso
(1)
,
Remy Gassilloud
,
Mickael Ribotta
(1)
,
Laurent Brevard
(1)
,
Valerie Lapras
(1)
,
François Andrieu
,
Fréd Gaillard
Claire Fenouillet-Beranger
- Function : Author
Camila Calvacante
- Function : Author
Remy Gassilloud
- Function : Author
François Andrieu
- Function : Author
Fréd Gaillard
- Function : Author