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Physical chemistry of the TiN/Hf 0.5 Zr 0.5 O 2 interface

W. Hamouda 1, 2 A. Pancotti 2 C. Lubin 1, 2 L. Tortech 3, 4 C. Richter 5 T. Mikolajick 5 U. Schroeder 5 N. Barrett 1, 2 
2 LENSIS - Laboratoire d'Etude des NanoStructures et Imagerie de Surface
SPEC - UMR3680 - Service de physique de l'état condensé, IRAMIS - Institut Rayonnement Matière de Saclay
4 LICSEN - Laboratoire Innovation en Chimie des Surfaces et NanoSciences
NIMBE UMR 3685 - Nanosciences et Innovation pour les Matériaux, la Biomédecine et l'Energie (ex SIS2M)
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https://hal-cea.archives-ouvertes.fr/cea-03695415
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Submitted on : Tuesday, June 14, 2022 - 5:22:15 PM
Last modification on : Wednesday, September 28, 2022 - 11:37:12 AM

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W. Hamouda, A. Pancotti, C. Lubin, L. Tortech, C. Richter, et al.. Physical chemistry of the TiN/Hf 0.5 Zr 0.5 O 2 interface. Journal of Applied Physics, American Institute of Physics, 2020, 127 (6), pp.064105. ⟨10.1063/1.5128502⟩. ⟨cea-03695415⟩

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