High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation

Pierre-Marie Deleuze (1) , Kateryna Artyushkova (2) , Eugénie Martinez (1) , Olivier Renault (1)

1 DPFT - Département Plate-Forme Technologique
2 PHI - Physical electronics

Aluminum nitride was analyzed by high-energy photoelectron spectroscopy using monochromatic Cr K$\alpha$α (5414.8 eV) radiation. The reported data include a survey spectrum and high-resolution spectra of Al 1s, Al 2s, Al 2p, N 1s, O 1s, and C 1s core levels.

Mots clés: AlN; HAXPES; Cr Kα

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Pierre-Marie Deleuze, Kateryna Artyushkova, Eugénie Martinez, Olivier Renault. High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation. Surface Science Spectra, 2022, 29 (1), pp.014004. ⟨10.1116/6.0001510⟩. ⟨cea-03564241⟩