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Journal Articles Surface Science Spectra Year : 2022

High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation

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Abstract

Aluminum nitride was analyzed by high-energy photoelectron spectroscopy using monochromatic Cr K$\alpha$α (5414.8 eV) radiation. The reported data include a survey spectrum and high-resolution spectra of Al 1s, Al 2s, Al 2p, N 1s, O 1s, and C 1s core levels.
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Dates and versions

cea-03564241 , version 1 (10-02-2022)

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Pierre-Marie Deleuze, Kateryna Artyushkova, Eugénie Martinez, Olivier Renault. High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation. Surface Science Spectra, 2022, 29 (1), pp.014004. ⟨10.1116/6.0001510⟩. ⟨cea-03564241⟩
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