Skip to Main content Skip to Navigation
Journal articles

High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation

Abstract : Aluminum nitride was analyzed by high-energy photoelectron spectroscopy using monochromatic Cr K$\alpha$α (5414.8 eV) radiation. The reported data include a survey spectrum and high-resolution spectra of Al 1s, Al 2s, Al 2p, N 1s, O 1s, and C 1s core levels.
Keywords : AlN HAXPES Cr Kα
Complete list of metadata

https://hal-cea.archives-ouvertes.fr/cea-03564241
Contributor : Contributeur MAP CEA Connect in order to contact the contributor
Submitted on : Thursday, February 10, 2022 - 12:01:11 PM
Last modification on : Tuesday, March 8, 2022 - 4:17:01 PM
Long-term archiving on: : Wednesday, May 11, 2022 - 6:31:54 PM

File

SSS21-AR-XPSAES-HEX2021-00043....
Files produced by the author(s)

Identifiers

Collections

CEA | DRT | LETI | CEA-GRE | ANR

Citation

Pierre-Marie Deleuze, Kateryna Artyushkova, Eugénie Martinez, Olivier Renault. High-energy photoelectron spectroscopy of AlN with Cr K$\alpha$ excitation. Surface Science Spectra, American Vacuum Society, 2022, 29 (1), pp.014004. ⟨10.1116/6.0001510⟩. ⟨cea-03564241⟩

Share

Metrics

Record views

14

Files downloads

15