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Journal Articles Physica Status Solidi A Year : 2021

Reference-free combined XRR-GIXRF analysis at the French Synchrotron SOLEIL

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Abstract

Chambre d'Analyse Spectrométrique en Transmission ou en Réflexion (Analysis Chamber for Transmission or Reflection Spectrometry) (CASTOR) is a new instrument, operated at the SOLEIL synchrotron facility, dedicated to the metrological characterization of thin films with thicknesses in the nanometer range. The instrument can combine two X-ray techniques, namely, the reflectivity (XRR) measurements with fluorescence (XRF) acquisitions and especially total-reflection X-ray fluorescence (TXRF)-related techniques such as grazing-incidence XRF (GIXRF). The instrument is most often installed on the hard X-ray branch of the Metrology beamline. Geometrical characterization is presented, reproducibility of measurements is studied, and the reference-free GIXRF analysis is described. Some representative examples are given to illustrate the capabilities of the setup and the combined analysis procedure.
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cea-03324651 , version 1 (23-08-2021)

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Yves Menesguen, Marie-Christine Lepy. Reference-free combined XRR-GIXRF analysis at the French Synchrotron SOLEIL. Physica Status Solidi A, 2021, pp.2100423. ⟨10.1002/pssa.202100423⟩. ⟨cea-03324651⟩
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