Reference-free combined XRR-GIXRF analysis at the French Synchrotron SOLEIL

Yves Menesguen (1) , Marie-Christine Lepy (1)

1 LNHB - Laboratoire National Henri Becquerel

Chambre d'Analyse Spectrométrique en Transmission ou en Réflexion (Analysis Chamber for Transmission or Reflection Spectrometry) (CASTOR) is a new instrument, operated at the SOLEIL synchrotron facility, dedicated to the metrological characterization of thin films with thicknesses in the nanometer range. The instrument can combine two X-ray techniques, namely, the reflectivity (XRR) measurements with fluorescence (XRF) acquisitions and especially total-reflection X-ray fluorescence (TXRF)-related techniques such as grazing-incidence XRF (GIXRF). The instrument is most often installed on the hard X-ray branch of the Metrology beamline. Geometrical characterization is presented, reproducibility of measurements is studied, and the reference-free GIXRF analysis is described. Some representative examples are given to illustrate the capabilities of the setup and the combined analysis procedure.

Keywords: metrology; Ionizing radiation; Radioactivity; Spectrometry; SOLEIL synchrotron; thin film; thin-film structures; X-ray; Primary activity measurement; reflectivity; X-ray fluorescence (XRF); total-reflection X-ray fluorescence (TXRF); grazing-incidence XRF (GIXRF); reproducibility

Domains: Instrumentation and Detectors [physics.ins-det]; Materials Science [cond-mat.mtrl-sci]; Nuclear Experiment [nucl-ex]

Yves Menesguen, Marie-Christine Lepy. Reference-free combined XRR-GIXRF analysis at the French Synchrotron SOLEIL. Physica Status Solidi A, 2021, pp.2100423. ⟨10.1002/pssa.202100423⟩. ⟨cea-03324651⟩