VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors

J Arcamone (1) , A Niel (1) , V Gouttenoire (1) , M Petitjean (1) , N David (1) , R Barattin (1) , M Matheron (1) , F Ricoul (1) , T Bordy (1) , H Blanc (1) , J Ruellan (1) , D Mercier (1) , N Pereira-Rodrigues (1) , G Costa (1) , V Agache (1) , S Hentz (1) , Jean-Christophe P. Gabriel (2, 1) , F Baleras (1) , C Marcoux (1) , T Ernst (1) , L Duraffourg (1) , E Colinet (1) , E B Myers (3) , M L Roukes (3) , P Andreucci (1) , E Ollier (1) , P Puget (1)

1 CEA - CEA Grenoble
2 INAC - Institut Nanosciences et Cryogénie
3 CALTECH - California Institute of Technology

This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.

Domains: Chemical Sciences; Engineering Sciences [physics]

J Arcamone, A Niel, V Gouttenoire, M Petitjean, N David, et al.. VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors. IEDM - 2011 IEEE International Electron Devices Meeting, Dec 2011, Washington DC, United States. pp.669-672. ⟨cea-03323275⟩