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VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors

Abstract : This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.
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https://hal-cea.archives-ouvertes.fr/cea-03323275
Contributor : Jean-Christophe Gabriel Connect in order to contact the contributor
Submitted on : Friday, August 20, 2021 - 4:26:51 PM
Last modification on : Thursday, August 26, 2021 - 3:17:59 AM

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  • HAL Id : cea-03323275, version 1

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J Arcamone, A Niel, V Gouttenoire, M Petitjean, N David, et al.. VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors. IEDM - 2011 IEEE International Electron Devices Meeting, Dec 2011, Washington DC, United States. pp.669-672. ⟨cea-03323275⟩

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