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VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors

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J Arcamone
  • Function : Author
  • PersonId : 1107913
A Niel
  • Function : Author
V Gouttenoire
  • Function : Author
M Petitjean
  • Function : Author
N David
  • Function : Author
R Barattin
  • Function : Author
M Matheron
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F Ricoul
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T Bordy
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H Blanc
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J Ruellan
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D Mercier
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N Pereira-Rodrigues
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G Costa
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V Agache
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S Hentz
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F Baleras
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C Marcoux
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T Ernst
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L Duraffourg
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E Colinet
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P Andreucci
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E Ollier
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P Puget
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Abstract

This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.
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Dates and versions

cea-03323275 , version 1 (20-08-2021)

Identifiers

  • HAL Id : cea-03323275 , version 1

Cite

J Arcamone, A Niel, V Gouttenoire, M Petitjean, N David, et al.. VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors. IEDM - 2011 IEEE International Electron Devices Meeting, Dec 2011, Washington DC, United States. pp.669-672. ⟨cea-03323275⟩
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