Magnetoresistive Sensor in Two-Dimension on a 25 μm Thick Silicon Substrate for In Vivo Neuronal Measurements

Abstract : Neuronal electrical activity is widely studied in vivo, and the ability to measure its magnetic equivalent to obtain an undisturbed signal with both amplitude and direction information leading to neuronal signal mapping would be a promising tool for neuroscience. To provide such a tool, a probe with spin-electronics-based magnetic sensors with orthogonal axes of sensitivity for two directions of measurement is realized, thanks to a local magnetization re-orientation technique induced by Joule heating. This probe is tested under in vivo measurement conditions in the brain of an anesthetized rat. To be as close as possible to neurons and to create minimal damage during the probe’s insertion, the tip thickness has been drastically decreased using a silicon-on-insulator substrate. Our probes provide the ability to perform in vivo magnetic measurements on two orthogonal axes on a 25 μm thick silicon tip with a sensitivity of 1.7%/mT along one axis and 0.9%/mT along the perpendicular axis in the sensor plane, for a limit of detection at 1 kHz of 1.0 and 1.3 nT, respectively. These probes have been tested through a phantom study and during an in vivo experiment. The robustness and stability over one year are demonstrated.