Patents
Year : 2020
Samuel Tardif : Connect in order to contact the contributor
https://hal-cea.archives-ouvertes.fr/cea-03096058
Submitted on : Monday, January 4, 2021-6:58:21 PM
Last modification on : Sunday, June 26, 2022-12:31:52 AM
Dates and versions
Identifiers
- HAL Id : cea-03096058 , version 1
Cite
Vincent Reboud, Alban Gassenq, S. Tardif, Vincent Calvo, Alexei Tchelnokov. Semiconductor structure including a suspended membrane containing a central segment of structured thickness. United States, Patent n° : US10666019B2. 2020. ⟨cea-03096058⟩
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