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Patents Year : 2020

Semiconductor structure including a suspended membrane containing a central segment of structured thickness

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Dates and versions

cea-03096058 , version 1 (04-01-2021)

Identifiers

  • HAL Id : cea-03096058 , version 1

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Vincent Reboud, Alban Gassenq, S. Tardif, Vincent Calvo, Alexei Tchelnokov. Semiconductor structure including a suspended membrane containing a central segment of structured thickness. United States, Patent n° : US10666019B2. 2020. ⟨cea-03096058⟩
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