https://hal-cea.archives-ouvertes.fr/cea-03096058
Contributor : Samuel Tardif <>
Submitted on : Monday, January 4, 2021 - 6:58:21 PM Last modification on : Wednesday, January 6, 2021 - 3:25:01 AM
Vincent Reboud, Alban Gassenq, S. Tardif, Vincent Calvo, Alexei Tchelnokov. Semiconductor structure including a suspended membrane containing a central segment of structured thickness. United States, Patent n° : US10666019B2. 2020. ⟨cea-03096058⟩