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Semiconductor structure including a suspended membrane containing a central segment of structured thickness

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https://hal-cea.archives-ouvertes.fr/cea-03096058
Contributor : Samuel Tardif <>
Submitted on : Monday, January 4, 2021 - 6:58:21 PM
Last modification on : Friday, April 9, 2021 - 3:13:05 AM

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  • HAL Id : cea-03096058, version 1

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Vincent Reboud, Alban Gassenq, S. Tardif, Vincent Calvo, Alexei Tchelnokov. Semiconductor structure including a suspended membrane containing a central segment of structured thickness. United States, Patent n° : US10666019B2. 2020. ⟨cea-03096058⟩

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