Study of annealing-induced interdiffusion in In$_2$O$_3$/Ag/In$_2$O$_3$ structures by a combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis

Béranger Caby (1) , Fabio Brigidi (2, 3) , D. Ingerle (4) , Emmanuel Nolot (1) , Giancarlo Pepponi (2) , Christina Streli (4) , Luca Lutterotti (5) , Agathe André (1) , Guillaume Rodriguez (1) , Patrice Gergaud (1) , Magali Morales (6) , Daniel Chateigner (7)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 FBK - Fondazione Bruno Kessler [Trento, Italy]
3 Dipartimento di Ingegneria Industriale [Trento]
4 TU Wien - Vienna University of Technology = Technische Universität Wien
5 UNITN - Università degli Studi di Trento = University of Trento
6 CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique
7 CRISMAT - Laboratoire de cristallographie et sciences des matériaux

The combination of X-ray reflectivity and grazing incidence X-ray fluorescence has been applied to the characterization of an In$_2$ O$_3$/Ag/In$_2$O$_3$ stack for advanced photovoltaic applications. X-ray reflectivity is a well-known method for the characterization of multilayered structures by providing information on the thickness and the in-depth electronic density. Grazing incidence X-ray fluorescence provides information about the elemental depth distribution. As these techniques are based on similar measurement procedures and data evaluation approaches, their combination reduces the uncertainties of the individual techniques and provides an accurate depth-resolving analysis of multi-layers. It has been shown that the combination of the techniques give insight into the material composition and the layers structure (thickness, density) as well as modifications induced by a thermal annealing. As X-ray fluorescence signals have been acquired at different excitation energies, the influence of this parameter on the sensitivity of the measurements to the structural properties has been shown.

Mots clés: XRR; GIXRF; Depth-profiling; Thin layer characterization

Domaines: Sciences de l'ingénieur [physics]; Matériaux

Béranger Caby, Fabio Brigidi, D. Ingerle, Emmanuel Nolot, Giancarlo Pepponi, et al.. Study of annealing-induced interdiffusion in In$_2$O$_3$/Ag/In$_2$O$_3$ structures by a combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis. Spectrochimica Acta Part B: Atomic Spectroscopy, 2015, 113, pp.132-137. ⟨10.1016/j.sab.2015.09.008⟩. ⟨cea-02957349⟩