Optimization of HiPIMS metal coating interface and properties by in-situ plasma etching pretreatment

Angélique Chabanon (1) , Alexandre Michau (1) , Michel Schlegel (1) , Frédéric Schuster (2) , Zhili Dong (3) , Fanny Balbaud (4)

1 LISL - laboratoire d'ingénierie des surfaces et lasers
2 CEA - Commissariat à l'énergie atomique et aux énergies alternatives
3 JAIST - Japan Advanced Institute of Science and Technology
4 ISAS - Institut des Sciences Appliquées et de la Simulation pour les énergies bas carbone

Deposition of dense Ti and Zr coatings by high power impulse magnetron sputtering (HiPIMS) was performed to enhance the lifespan of stainless steel 304L infrastructures and tools in corrosive environments. The effect of Ar+, Ti+ and Zr+ in-situ etching pretreatment on the substrate-coating interface and coating properties was investigated. Characterization by SEM and TEM shows the polycrystalline structure, high density and adhesion of metal coatings on the substrate. XPS analysis reveals surface modifications due to etching pretreatments. Electrochemical measurements quantify the improvement in corrosion resistance in saline environments due to etching and coating with a 200-nm-thick metal layer.

Domaines: Matériaux

Angélique Chabanon, Alexandre Michau, Michel Schlegel, Frédéric Schuster, Zhili Dong, et al.. Optimization of HiPIMS metal coating interface and properties by in-situ plasma etching pretreatment. 4th Meeting of the French-Singaporean Research Network on Renewable Energy (SINERGIE), Nov 2019, Singapour, Singapore. ⟨cea-02927611⟩