Millimeter-sized particle sensor using a wide field of view monolithic lens assembly for light scattering analysis in Fourier domain

Gabriel Jobert (1, 2) , Maryse Fournier (1) , Salim Boutami (1) , Cécile Jamois (2) , Andrea Lovera (3) , Daniele Braga (3) , Christian Seassal (2)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 INL - I-Lum - INL - Ingénierie et conversion de lumière (i-Lum)
3 FEMTOprint

We present our latest advances in the field of miniature optical particulate matter sensors. By illuminating a single particle in an air channel, one can record the light scattering signature with a CMOS image sensor and then classify particles. This signature is optically pre-processed with an advanced, millimeter-sized, monolithic, refracto-reflective optical system. It performs notably a Fourier transform with very wide field of view of scattering angles, and includes as well integrated fluidics and alignment. Functional prototypes were fabricated using laser micro machining on glass, selective polishing, and were replicated with epoxy resin using a molding process.

Mots clés: Particulate matter; Light-scattering; Miniature sensor; Miniature optics; Air quality; CMOS image sensor; Particulate matter

Domaines: Optique / photonique; Electromagnétisme; Optique [physics.optics]; Instrumentations et Détecteurs [physics.ins-det]; Micro et nanotechnologies/Microélectronique

Gabriel Jobert, Maryse Fournier, Salim Boutami, Cécile Jamois, Andrea Lovera, et al.. Millimeter-sized particle sensor using a wide field of view monolithic lens assembly for light scattering analysis in Fourier domain. Photonics West 2020, SPIE, Feb 2020, San Francisco, United States. ⟨10.1117/12.2544185⟩. ⟨cea-02432909⟩