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Journal articles
Development of a tip enhanced near-field laser ablation system for sub-micrometric analysis of solid samples
Abstract : A near-field laser ablation system was developed for the analysis of inorganic solid samples in the
nanometer resolution range. The instrument is based on the coupling of a nanosecond Nd:YAG laser
with an atomic force microscope. The technique uses a tip enhancement effect obtained by the
interaction of laser radiation with the conductive tip of the AFM maintained at a few nanometers above
the sample surface. By applying this technique to conducting gold and semiconducting silicon samples,
a lateral resolution of 100 nm was demonstrated. With a single laser pulse, craters of about 100 nm in
diameter and a few nanometers in depth were obtained. A multi-parametric study was carried out in
order to understand the effect of different experimental parameters (laser fluence, tip-to-sample
distance, sample and tip nature) on the near-field laser ablation efficiency, crater dimensions and
amount of ablated material. Numerical simulations of the localized heating with a home-made 3-D code
presented a good explanation for the nanometer-sized crater diameters obtained in our experiments
Cited literature [42 references]
https://hal-cea.archives-ouvertes.fr/cea-02421723
Contributor : Amplexor Amplexor <>
Submitted on : Tuesday, February 18, 2020 - 11:41:10 AM
Last modification on : Tuesday, April 28, 2020 - 11:28:17 AM
Long-term archiving on: : Tuesday, May 19, 2020 - 12:21:51 PM
Contributor : Amplexor Amplexor <>
Submitted on : Tuesday, February 18, 2020 - 11:41:10 AM
Last modification on : Tuesday, April 28, 2020 - 11:28:17 AM
Long-term archiving on: : Tuesday, May 19, 2020 - 12:21:51 PM
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