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Journal articles
Development of a tip enhanced near-field laser ablation system for the sub-micrometric analysis of solid samples
Abstract : A near-field laser ablation system was developed for the analysis of inorganic solid samples in the nanometer resolution range. The instrument is based on the coupling of a nanosecond Nd:YAG laser with an atomic force microscope. The technique uses a tip enhancement effect obtained by the interaction of laser radiation with the conductive tip of the AFM maintained at a few nanometers above the sample surface. By applying this technique to conducting gold and semiconducting silicon samples, a lateral resolution of 100 nm was demonstrated. With a single laser pulse, craters of about 100 nm in diameter and a few nanometers in depth were obtained. A multi-parametric study was carried out in order to understand the effect of different experimental parameters (laser fluence, tip-to-sample distance, sample and tip nature) on the near-field laser ablation efficiency, crater dimensions and amount of ablated material. Numerical simulations of the localized heating with a home-made 3-D code presented a good explanation for the nanometer-sized crater diameters obtained in our experiments.
https://hal-cea.archives-ouvertes.fr/cea-02389279
Contributor : Amplexor Amplexor <>
Submitted on : Monday, December 2, 2019 - 2:26:56 PM
Last modification on : Thursday, June 25, 2020 - 2:54:34 PM
Contributor : Amplexor Amplexor <>
Submitted on : Monday, December 2, 2019 - 2:26:56 PM
Last modification on : Thursday, June 25, 2020 - 2:54:34 PM
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