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https://hal-cea.archives-ouvertes.fr/cea-02362645
Submitted on : Thursday, November 14, 2019-8:01:59 AM
Last modification on : Tuesday, December 6, 2022-12:42:14 PM
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- HAL Id : cea-02362645 , version 1
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Laure Fillaud, Xavier Lefèvre, Bruno Jousselme, Serge Palacin, S. Smaali, et al.. Isolation and protection of germaniun for applications in nanoelectronics. ElecNano6, May 2014, Paris, France. ⟨cea-02362645⟩
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