Elaboration of Nanocomposite Coatings by Coupling Aerosol Jets and Physical Vapour Deposition
Résumé
We propose a generic method for the elaboration, in a
single step and in a confined chamber, of nanocomposite
coatings consisting of nanoparticles (NP) from 4 to 100
nm, homogeneously distributed in a matrix. The process
combines the jet of nanoparticles in vacuum (JNV)
technology and Physical Vapor Deposition (PVD). The
hybridization of these two techniques is made possible
by routing nanoparticles in the aerosol form to the
substrate, either immediately after their synthesis in the
gas phase, or from colloidal suspensions. The
simultaneous deposition of the particles and the matrix is
achieved on the same face of the same substrate. The
process is innovative in that it allows an unlimited
selection in the respective chemical compositions of
nanoparticles and the matrix, and a moderate
temperature of the substrate. The general scheme of the
process is presented in Figure 1a. A laser-driven
pyrolysis reactor can be used for in-situ synthesis of
nanoparticles. Laser pyrolysis is an efficient method to
synthesize various high purity nanopowders, oxides and
non-oxides, in a gas phase bottom-up approach [1]. An
atomizer that produces aerosol from colloidal suspension
of previously synthesized nanoparticles can also be used.
The JNV is obtained by the use of an
aerodynamic lens system, which is composed of
chambers separated by diaphragms, which produces a
collimated beam of nanoparticles under vacuum [2]. This
kind of beam is currently used for gas phase
characterization of freestanding nanoparticles or for
precision 3D printing with a high deposition rate. We
show that it is possible to obtain an angle-controlled
divergent and homogenous jet of nanoaerosols, as well,
by changing the geometry of a classical lens. We
demonstrate the adaptation if the JNV technique with
pressure environment required for running a classical
magnetron sputtering device. The later is used for
depositing, on the same substrate and in the same time,
the material constituting the matrix of the composite
film.
The possibility to elaborate large and homogenous
nanostructured films were investigated with different
types of nanoaerosols with different sizes and densities.
Samples composed of gold and silicon nanoparticles (see
Figure 1b) will be shown. Many applications are already
considered for this type of coatings, including
photovoltaic, aesthetic coatings for luxury industry, hard
covering for tools or self-healing films.
Domaines
Matériaux
Origine : Fichiers produits par l'(les) auteur(s)
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