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ion beam analysis of light elements in thin films: common uses and capabilities

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Material chemistry

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https://hal-cea.archives-ouvertes.fr/cea-02328112

Submitted on : Wednesday, October 23, 2019-10:09:17 AM

Last modification on : Friday, March 24, 2023-2:53:13 PM

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cea-02328112 , version 1 (23-10-2019)

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  • HAL Id : cea-02328112 , version 1

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Pascal Berger, Hicham Khodja, C C Raepsaet, Suzy Surblé. ion beam analysis of light elements in thin films: common uses and capabilities. 78th IUVSTA Workshop, Oct 2015, Braga, Portugal. ⟨cea-02328112⟩

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CEA CNRS PUBNIMBE INC-CNRS IRAMIS-NIMBE CEA-UPSAY UNIV-PARIS-SACLAY GS-ENGINEERING IRAMIS GS-CHIMIE GS-PHYSIQUE INSTITUT-SCIENCES-LUMIERE
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