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ion beam analysis of light elements in thin films: common uses and capabilities

Pascal Berger 1 Hicham Khodja 1 C C Raepsaet 1 Suzy Surblé 1 
1 LEEL - UMR 3685 - Laboratoire d'Etudes des Eléments Légers
NIMBE UMR 3685 - Nanosciences et Innovation pour les Matériaux, la Biomédecine et l'Energie (ex SIS2M)
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https://hal-cea.archives-ouvertes.fr/cea-02328112
Contributor : Serge Palacin Connect in order to contact the contributor
Submitted on : Wednesday, October 23, 2019 - 10:09:17 AM
Last modification on : Wednesday, December 15, 2021 - 11:20:15 AM

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  • HAL Id : cea-02328112, version 1

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CEA | CNRS | PUBNIMBE | INC-CNRS | IRAMIS-NIMBE | CEA-UPSAY | UNIV-PARIS-SACLAY | GS-ENGINEERING | IRAMIS | GS-CHIMIE | INSTITUT-SCIENCES-LUMIERE

Citation

Pascal Berger, Hicham Khodja, C C Raepsaet, Suzy Surblé. ion beam analysis of light elements in thin films: common uses and capabilities. 78th IUVSTA Workshop, Oct 2015, Braga, Portugal. ⟨cea-02328112⟩

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