Demonstration and Fabrication Tolerance Study of Temperature-Insensitive Silicon-Photonic MZI Tunable by a Metal Heater

Abstract : We present a temperature-insensitive tunable silicon-photonic Mach-Zehnder interferometer (MZI) filter fabricated by deep ultraviolet lithography. The wavelength shift of the MZI filter depending on temperature is reduced down to -4 pm/degrees C at similar to 1480 nm using a design with waveguide narrowing and widening, and the MZI filter is tunable with a thermal heater at an efficiency of 24 mW/free spectral range (FSR). The FSR of the MZI is about 5.8 nm, which corresponds to a channel spacing of 2.9 nm for a two-channel MZI. We discuss the fabrication tolerance of the fabricated MZI according to experimental and simulation results and show design parameters for a fabrication-tolerant temperature-insensitive MZI with a 20-nm channel spacing for coarse wavelength-division multiplexing application.
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https://hal-cea.archives-ouvertes.fr/cea-02202426
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Submitted on : Wednesday, July 31, 2019 - 4:34:26 PM
Last modification on : Friday, August 2, 2019 - 2:59:33 AM

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Jong-Moo Lee, Min-Su Kim, Joon Tae Ahn, Laetitia Adelmini, Daivid Fowler, et al.. Demonstration and Fabrication Tolerance Study of Temperature-Insensitive Silicon-Photonic MZI Tunable by a Metal Heater. Journal of Lightwave Technology, Institute of Electrical and Electronics Engineers (IEEE)/Optical Society of America(OSA), 2017, 35 (22), ⟨10.1109/JLT.2017.2763244⟩. ⟨cea-02202426⟩

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