J. Arcamone, A. Niel, V. Gouttenoire, M. Petitjean, N. David et al., « VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors, Electron Devices Meeting (IEDM), 2011.

E. Sage, A. Brenac, T. Alava, R. Morel, C. Dupré et al., « Neutral particle mass spectrometry with nanomechanical systems, Nat. Commun, vol.6, 2015.

W. Ludurczak, G. Gourlat, M. Gely, G. Billiot, J. Philippe et al., « Large scale integration of silicon nanomechanical resonators above industrial cmos wafers

M. S. Hanay, S. Kelber, A. K. Naik, D. Chi, S. Hentz et al., Single-protein nanomechanical mass spectrometry in real time, Nat. Nanotechnol, vol.7, issue.9, p.602, 2012.

J. Arcamone, C. Dupré, G. Arndt, E. Colinet, S. Hentz et al., « VHF NEMS-CMOS piezoresistive resonators for advanced sensing applications, Nanotechnology, vol.25, p.435501

J. Philippe, G. Arndt, E. Colinet, M. Savoye, T. Ernst et al., « Fully monolithic and ultra-compact NEMS-CMOS selfoscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1071-1074, 2014.

G. Gourlat, M. Sansa, G. Jourdan, P. Villard, G. Sicard et al., « Dual-mode NEMS self-oscillator for mass sensing, Frequency Control Symposium the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International, pp.222-225, 2015.

E. Mile, G. Jourdan, I. Bargatin, S. Labarthe, C. Marcoux et al., « In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection, vol.21, p.165504

I. Bargatin, E. B. Myers, J. Arlett, B. Gudlewski, and M. L. Roukes, « Sensitive detection of nanomechanical motion using piezoresistive signal downmixing, Appl. Phys. Lett, vol.86, issue.13, p.133109, 2005.

, IEEE Standard Definitions of Physical Quantities for Fundamental Frequency and Time Metrology -Random Instabilities, 1999.