Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities

X. Checoury (1) , D. Néel (1) , P. Boucaud (1) , C. Gesset (2) , Hugues Girard (2) , S. Saada (2) , P. Bergonzo (2)

1 IEF - Institut d'électronique fondamentale
2 LCD (CEA, LIST) - Laboratoire Capteurs Diamant (CEA, LIST)

We demonstrate a diamond photonics platform with integrated suspended waveguide-cavity structures and two dimensional photonic crystal (PhC) cavities. PhC cavities with quality factors exceeding 2800 have been fabricated using a top-down approach from thin nanocrystalline diamond films. The developed technological process allows one to access these cavities in a fully planar geometry, including light injection and collection from the outside using lensed-fibers. This diamond platform opens the road to large scale fabrication of photonics devices including optical sensor chips.

Mots clés: light collection; diamond; diamond photonics platform; suspended waveguide-cavity structure; photonic crystal cavity; quality factor; thin nanocrystalline diamond film; technological process; lensed-fiber; light injection

Domaines: Science des matériaux [cond-mat.mtrl-sci]

X. Checoury, D. Néel, P. Boucaud, C. Gesset, Hugues Girard, et al.. Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities. Applied Physics Letters, inPress, 101 (17), pp.171115. ⟨10.1063/1.4764548⟩. ⟨cea-02189558⟩