Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities

X. Checoury 1 D. Néel 1 P. Boucaud 1 C. Gesset 2 H. Girard 2 S. Saada 2 P. Bergonzo 2
1 IEF - Institut d'électronique fondamentale
2 LCD-LIST - Laboratoire Capteurs Diamant
DM2I - Département Métrologie Instrumentation & Information : DRT/LIST/DM2I
Abstract : We demonstrate a diamond photonics platform with integrated suspended waveguide-cavity structures and two dimensional photonic crystal (PhC) cavities. PhC cavities with quality factors exceeding 2800 have been fabricated using a top-down approach from thin nanocrystalline diamond films. The developed technological process allows one to access these cavities in a fully planar geometry, including light injection and collection from the outside using lensed-fibers. This diamond platform opens the road to large scale fabrication of photonics devices including optical sensor chips.
Keywords : diamond diamond photonics platform suspended waveguide-cavity structure photonic crystal cavity quality factor thin nanocrystalline diamond film technological process lensed-fiber light injection light collection
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Journal articles
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https://hal-cea.archives-ouvertes.fr/cea-02189558
Contributor : Hugues Girard <>
Submitted on : Friday, July 19, 2019 - 4:39:12 PM
Last modification on : Wednesday, September 4, 2019 - 1:40:15 PM

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X. Checoury, D. Néel, P. Boucaud, C. Gesset, H. Girard, et al.. Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities. Applied Physics Letters, American Institute of Physics, In press, 101 (17), pp.171115. ⟨10.1063/1.4764548⟩. ⟨cea-02189558⟩

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