Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities

Abstract : We demonstrate a diamond photonics platform with integrated suspended waveguide-cavity structures and two dimensional photonic crystal (PhC) cavities. PhC cavities with quality factors exceeding 2800 have been fabricated using a top-down approach from thin nanocrystalline diamond films. The developed technological process allows one to access these cavities in a fully planar geometry, including light injection and collection from the outside using lensed-fibers. This diamond platform opens the road to large scale fabrication of photonics devices including optical sensor chips.