PCM compact model: Optimized methodology for model card extraction

Corentin Pigot (1) , Fabien Gilibert (1) , Marina Reyboz (2) , Marc Bocquet (3) , Jean-Michel Portal (3)

1 ST-CROLLES - STMicroelectronics [Crolles]
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
3 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

To achieve high yield on product embedding PCM memory, it is mandatory to provide to designers accurately calibrated PCM compact model. To achieve this goal, it is mandatory to develop standardized model card extraction methodology. In this paper, we present a PCM model card extraction flow based on a minimal set of static and dynamic measurements. Based on this measurement, characteristics are first obtained and model card parameters extracted without any loop back, i.e. each parameter is extracted only once on a given characteristic. After this extraction procedure, model card values are validated through a comparison with an extra characteristics SET-Low characteristic not used for the extraction.

Mots clés: resistive memory.; compact model; model extraction; PCM; PCRAM; phase change random access memory; resistive memory

Domaines: Sciences de l'ingénieur [physics]

Corentin Pigot, Fabien Gilibert, Marina Reyboz, Marc Bocquet, Jean-Michel Portal. PCM compact model: Optimized methodology for model card extraction. 2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2018, Austin, United States. pp.190-193, ⟨10.1109/SISPAD.2018.8551654⟩. ⟨cea-02188521⟩