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Conference papers
Dynamic control of an accelerometer bandwidth through tunable damping factor and effective moment of inertia
Abstract : In this paper, we report the dynamic bandwidth control of an accelerometer by reducing both its quality factor and
its effective inertia. The MEMS is coupled with two builtin resistors to tune the frequency response through a DC
voltage. The conception, the fabrication and the electrical testing of the accelerometer are presented. The reduction of
the effective moment of inertia is experimentally evidenced on the basis of an analytical model. To the best of our
knowledge, such a control of the bandwidth including inertial effects has not been reported yet. This strategy does
not impact the quasi-static gain of the device and may be operated in vacuum.
https://hal-cea.archives-ouvertes.fr/cea-02188415
Contributor : Bruno Savelli Connect in order to contact the contributor
Submitted on : Thursday, July 18, 2019 - 2:44:05 PM
Last modification on : Friday, January 7, 2022 - 9:26:01 AM
Contributor : Bruno Savelli Connect in order to contact the contributor
Submitted on : Thursday, July 18, 2019 - 2:44:05 PM
Last modification on : Friday, January 7, 2022 - 9:26:01 AM