Ultra sensitive optomechanical microdisk resonators with very large scale integration process

Maxime Hermouet; Marc Sansa; Louise Banniard; Alexandre Fafin; Marc Gély; Pierre Etienne Allain; Eduardo Gil Santos; Ivan Favero; Thomas Alava; Guillaume Jourdan; Sebastien Hentz

doi:10.1109/MEMSYS.2018.8346687

Conference papers

Ultra sensitive optomechanical microdisk resonators with very large scale integration process

Maxime Hermouet ^{1, 2} Marc Sansa ^{2, 1} Louise Banniard ^{1, 2} Alexandre Fafin ^{1, 2, 3} Marc Gély ^{1, 2} Pierre Etienne Allain ³ Eduardo Gil Santos ³ Ivan Favero ³ Thomas Alava ^{1, 2} Guillaume Jourdan ^{1, 2} Sebastien Hentz ^{1, 2, *}

* Corresponding author

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

2 UGA [2016-2019] - Université Grenoble Alpes [2016-2019]

3 MPQ (UMR_7162) - Laboratoire Matériaux et Phénomènes Quantiques

Abstract : Nano-optomechanical resonators have demonstrated in the last few years their enormous potential for applications such as mass and chemical sensing. Operation in liquid of such resonators has been demonstrated very recently by two groups, showing that biosensing could potentially be performed. Nonetheless, going a step further towards the next generation of high-end biosensors requires scaling up the fabrication process and being able to perform this type of measurement routinely. This paper reports the first Very Large Scale Integration silicon optomechanical microdisk resonators with state-of-the-art performance: high optical-Q and optomechanical coupling allow the Brownian noise of these resonators to be easily resolved at few 100 MHz in ambient air with many different devices and we show how optical performance is maintained in liquid.

Document type :

Conference papers

Domain :

Engineering Sciences [physics]

Complete list of metadatas

https://hal-cea.archives-ouvertes.fr/cea-02188390
Contributor : Bruno Savelli <>
Submitted on : Thursday, July 18, 2019 - 2:31:41 PM
Last modification on : Tuesday, December 8, 2020 - 10:21:16 AM

Ultra sensitive optomechanical microdisk resonators with very large scale integration process

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Ultra sensitive optomechanical microdisk resonators with very large scale integration process

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