First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

Hélène Lhermet (1) , Thierry Verdot (1) , Audrey Berthelot (1) , Brigitte Desloges (1) , Frédéric Souchon (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

For the first time, functional in-plane deflection microphones have been fabricated, validating a new concept based on a diaphragm moving in the plane of the substrate and inducing strain on piezoresistive Si nanogauges. Such architecture, integrating furthermore a back cavity, leads to microphones with a smaller footprint that preserve at the same time high performance, and is therefore adapted for the achievement of miniature sensors and their integration for medical applications or consumer electronics

Domains: Engineering Sciences [physics]

Hélène Lhermet, Thierry Verdot, Audrey Berthelot, Brigitte Desloges, Frédéric Souchon. First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges. 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2018, Belfast, United Kingdom. pp.249-252, ⟨10.1109/MEMSYS.2018.8346531⟩. ⟨cea-02188092⟩