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First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

Hélène Lhermet 1, * Thierry Verdot 1 Audrey Berthelot 1 Brigitte Desloges 1 Frédéric Souchon 1
* Corresponding author
1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
Abstract : For the first time, functional in-plane deflection microphones have been fabricated, validating a new concept based on a diaphragm moving in the plane of the substrate and inducing strain on piezoresistive Si nanogauges. Such architecture, integrating furthermore a back cavity, leads to microphones with a smaller footprint that preserve at the same time high performance, and is therefore adapted for the achievement of miniature sensors and their integration for medical applications or consumer electronics
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https://hal-cea.archives-ouvertes.fr/cea-02188092
Contributor : Bruno Savelli <>
Submitted on : Thursday, July 18, 2019 - 11:37:56 AM
Last modification on : Tuesday, December 8, 2020 - 10:16:29 AM

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Hélène Lhermet, Thierry Verdot, Audrey Berthelot, Brigitte Desloges, Frédéric Souchon. First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges. 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2018, Belfast, United Kingdom. pp.249-252, ⟨10.1109/MEMSYS.2018.8346531⟩. ⟨cea-02188092⟩

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