First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

Hélène Lhermet; Thierry Verdot; Audrey Berthelot; Brigitte Desloges; Frédéric Souchon

doi:10.1109/MEMSYS.2018.8346531

Conference papers

First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

Hélène Lhermet ^{1, *} Thierry Verdot ¹ Audrey Berthelot ¹ Brigitte Desloges ¹ Frédéric Souchon ¹

* Corresponding author

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Abstract : For the first time, functional in-plane deflection microphones have been fabricated, validating a new concept based on a diaphragm moving in the plane of the substrate and inducing strain on piezoresistive Si nanogauges. Such architecture, integrating furthermore a back cavity, leads to microphones with a smaller footprint that preserve at the same time high performance, and is therefore adapted for the achievement of miniature sensors and their integration for medical applications or consumer electronics

Document type :

Conference papers

Domain :

Engineering Sciences [physics]

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https://hal-cea.archives-ouvertes.fr/cea-02188092
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Submitted on : Thursday, July 18, 2019 - 11:37:56 AM
Last modification on : Tuesday, December 8, 2020 - 10:16:29 AM

First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

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First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

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