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First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

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Abstract

For the first time, functional in-plane deflection microphones have been fabricated, validating a new concept based on a diaphragm moving in the plane of the substrate and inducing strain on piezoresistive Si nanogauges. Such architecture, integrating furthermore a back cavity, leads to microphones with a smaller footprint that preserve at the same time high performance, and is therefore adapted for the achievement of miniature sensors and their integration for medical applications or consumer electronics
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cea-02188092 , version 1 (18-07-2019)

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Hélène Lhermet, Thierry Verdot, Audrey Berthelot, Brigitte Desloges, Frédéric Souchon. First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges. 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2018, Belfast, United Kingdom. pp.249-252, ⟨10.1109/MEMSYS.2018.8346531⟩. ⟨cea-02188092⟩
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