Hélène Lhermet, Thierry Verdot, Audrey Berthelot, Brigitte Desloges, Frédéric Souchon. First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges.
31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2018, Belfast, United Kingdom. pp.249-252,
⟨10.1109/MEMSYS.2018.8346531⟩.
⟨cea-02188092⟩