A new method for quickly evaluating reversible and permanent components of the BTI degradation
Résumé
A new method denoted SRP is proposed to quickly
evaluate reversible and permanent components responsible for
BTI degradation. It is based on a particular normalization of
NBTI drifts measured during DC stress and recovery. The origin
of this SRP is then highlighted by a complete modeling of NBTI
dataset. It actually arises from the presence of two trap
populations with much different capture and emission time
constants. The technique which can only be seen as $a\
mathematical\ trick$ is very suitable to address the sensitivity of
several process steps like nitridation to BTI. It can also provide a
simple analytical compact model easy to implement in a SPICElike simulator to analyze BTI reliability at circuit level.