Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays

D. Visser 1 S. B. Basuvalingam 1 Y. Desieres 1, 2 S. Anand 1
1 KTH - Royal Institute of Technology [Stockholm]
2 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
Abstract : Dielectric metasurfaces based on amorphous silicon (a-Si) nanodisks are interesting for nanophotonic applications due to the high refractive index and mature/low temperature fabrication of a-Si. The investigated metasurfaces consist of a-Si nanodisk arrays embedded in a transparent film. The diameter-dependent optical properties of the nanodisk Mie resonators have been investigated by finite-difference time-domain (FDTD) simulations and spectrally-resolved reflectivity and transmission measurements. Well-ordered substrate-free a-Si nanodisk arrays were fabricated and characterized with regard to their broadband anti-reflection properties when placed on a crystalline silicon (c-Si) surface, and reflectivity/ transmission properties when embedded in a polydimethylsiloxane (PDMS) film. Our results confirm broadband anti-reflection when placed on silicon, while the optical characteristics of the nanodisks embedded in PDMS are shown to be potentially useful for color/NIR filter applications as well as for coloring on the micro/nanoscale.
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Journal articles
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https://hal-cea.archives-ouvertes.fr/cea-02186464
Contributor : Marianne Leriche <>
Submitted on : Wednesday, July 17, 2019 - 12:21:55 PM
Last modification on : Friday, July 19, 2019 - 1:31:01 AM

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D. Visser, S. B. Basuvalingam, Y. Desieres, S. Anand. Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays. Optics Express, Optical Society of America, 2019, 27 (4), pp.5353-5367. ⟨10.1364/OE.27.005353⟩. ⟨cea-02186464⟩

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