Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays

D. Visser (1) , S. B. Basuvalingam (1) , Y. Desieres (1, 2) , S. Anand (1)

1 KTH - Royal Institute of Technology [Stockholm]
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Dielectric metasurfaces based on amorphous silicon (a-Si) nanodisks are interesting for nanophotonic applications due to the high refractive index and mature/low temperature fabrication of a-Si. The investigated metasurfaces consist of a-Si nanodisk arrays embedded in a transparent film. The diameter-dependent optical properties of the nanodisk Mie resonators have been investigated by finite-difference time-domain (FDTD) simulations and spectrally-resolved reflectivity and transmission measurements. Well-ordered substrate-free a-Si nanodisk arrays were fabricated and characterized with regard to their broadband anti-reflection properties when placed on a crystalline silicon (c-Si) surface, and reflectivity/ transmission properties when embedded in a polydimethylsiloxane (PDMS) film. Our results confirm broadband anti-reflection when placed on silicon, while the optical characteristics of the nanodisks embedded in PDMS are shown to be potentially useful for color/NIR filter applications as well as for coloring on the micro/nanoscale.

Domains: Engineering Sciences [physics]

D. Visser, S. B. Basuvalingam, Y. Desieres, S. Anand. Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays. Optics Express, 2019, 27 (4), pp.5353-5367. ⟨10.1364/OE.27.005353⟩. ⟨cea-02186464⟩