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Journal articles
Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays
Abstract : Dielectric metasurfaces based on amorphous silicon (a-Si) nanodisks are interesting for nanophotonic applications due to the high refractive index and mature/low temperature fabrication of a-Si. The investigated metasurfaces consist of a-Si nanodisk arrays embedded in a transparent film. The diameter-dependent optical properties of the nanodisk Mie resonators have been investigated by finite-difference time-domain (FDTD) simulations and spectrally-resolved reflectivity and transmission measurements. Well-ordered substrate-free a-Si nanodisk arrays were fabricated and characterized with regard to their broadband anti-reflection properties when placed on a crystalline silicon (c-Si) surface, and reflectivity/ transmission properties when embedded in a polydimethylsiloxane (PDMS) film. Our results confirm broadband anti-reflection when placed on silicon, while the optical characteristics of the nanodisks embedded in PDMS are shown to be potentially useful for color/NIR filter applications as well as for coloring on the micro/nanoscale.
https://hal-cea.archives-ouvertes.fr/cea-02186464
Contributor : Marianne Leriche <>
Submitted on : Wednesday, July 17, 2019 - 12:21:55 PM
Last modification on : Tuesday, October 6, 2020 - 4:30:49 PM
Contributor : Marianne Leriche <>
Submitted on : Wednesday, July 17, 2019 - 12:21:55 PM
Last modification on : Tuesday, October 6, 2020 - 4:30:49 PM
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