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Development and adhesion characterization of a silicon wafer for temporary bonding

Abstract : The development of a silicon temporary carrier for thin wafer handling for 3D applications was investigated. Process selection and optimization ended up with a silicon carrier entirely covered with an antistick layer based on a fluorinated polymer. The carrier preparation was quite easy because only one coating was used and no sticking edge zone was needed onto the carrier. The fluorinated coating led to a very hydrophobic behavior. When bonded with a thermoplastic glue, it also exhibited very antiadhesive properties because the adherence was as low as 0.4 J/m(2) and lower than the adherence of a stack without any antiadhesive layer (above 4 J/m(2)). The carrier was nevertheless suitable for different back side processes in 300 mm grinding, chemical cleaning, chemical mechanical polishing and silicon oxide deposition. Compared with a commercial carrier, it exhibited the same level of performance for the integration. The proposed carrier was compatible with a mechanical debonding of a thinned bonded structure with a silicon device wafer of 80 pm. The carrier recycling was possible without any new preparation.
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https://hal-cea.archives-ouvertes.fr/cea-02186238
Contributor : Marianne Leriche <>
Submitted on : Wednesday, July 17, 2019 - 11:05:17 AM
Last modification on : Thursday, June 11, 2020 - 5:04:08 PM

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P. Montmeat, T. Enot, G. Enyedi, M. Pellat, J. Thooris, et al.. Development and adhesion characterization of a silicon wafer for temporary bonding. International Journal of Adhesion and Adhesives, Elsevier, 2018, 82, pp.100-107. ⟨10.1016/j.ijadhadh.2018.01.007⟩. ⟨cea-02186238⟩

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