High Temperature Stability and Performance Analysis of N-doped Ge-Se-Sb based OTS Selector Devices

A. Verdy 1 G. Navarro 1 M. Bernard 1 P. Noé 1 C. Licitra 1 G. Bourgeois 1 J. Garrione 1 M.C. Cyrille 1 V. Sousa 1 E. Nowak 1
1 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
Abstract : In this paper, we investigate the stability at high temperature of N-doped Ge-Se-Sb based Ovonic Threshold Switching selectors (OTS). Annealing temperatures up to 400°C are explored, compatible with IC Back-End-Of-Line temperature budget (BEOL). Thanks to electrical characterization and material physico-chemical analysis, we show how an annealing of 30 minutes at 400°C is beneficial for the reduction of the threshold voltage. Moreover, after such thermal budget, an ultra-low leakage current of 0.1 nA at V$_{th}$/2 and an endurance of more than 10$^8$ cycles are still ensured. Electrical parameters and selector performance are then analyzed at stress temperatures up to 150°C, demonstrating the suitability of Ge-Se-Sb based OTS selector devices for BEOL integrations for applications targeting high temperature operating environments.
Keywords : Index Terms-OTS BEOL selector thermal stability N-doped Ge-Se-Sb high temperature
Document type :
Conference papers
Complete list of metadatas

Cited literature [15 references]  Display  Hide  Download
https://hal-cea.archives-ouvertes.fr/cea-02185375
Contributor : Bruno Savelli <>
Submitted on : Tuesday, July 16, 2019 - 3:46:27 PM
Last modification on : Wednesday, July 17, 2019 - 1:35:53 AM

File

Verd.pdf
Files produced by the author(s)

Identifiers

Collections

CEA | DRT | LETI | CEA-GRE

Citation

A. Verdy, G. Navarro, M. Bernard, P. Noé, C. Licitra, et al.. High Temperature Stability and Performance Analysis of N-doped Ge-Se-Sb based OTS Selector Devices. 2018 IEEE International Memory Workshop (IMW), May 2018, Kyoto, Japan. pp.1-4, ⟨10.1109/IMW.2018.8388834⟩. ⟨cea-02185375⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

31

Files downloads

78

Contact

CCSD