Quantum Cascade Laser Integration on Silicon for Gas Sensing
Résumé
Mir IR sensors are a preferred technical solution for many gas sensing applications. Non dispersive infrared is the most economical solution. However, it is limited in terms of sensitivity (>10ppm) and in terms of components because of strong interfering ones. A particularly powerfull solution is to use lasers instead of black bodies. However, lasers are expensive, mid-ir components are still limited and the integration both thermally and electronically are challenging. Integration on silicon is certainly a solution.