Quantum Cascade Laser Integration on Silicon for Gas Sensing

Mathieu Carras (1) , Mickael Brun (1) , Jean-Marc Fedeli (2) , Jean-Guillaume Coutard (2) , Laurent Duraffourg (2) , Grégory Maisons (1) , Guillaume Aoust (1) , Sergio Nicoletti (2) , Johan Abautret (1)

1 MirSense
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Mir IR sensors are a preferred technical solution for many gas sensing applications. Non dispersive infrared is the most economical solution. However, it is limited in terms of sensitivity (>10ppm) and in terms of components because of strong interfering ones. A particularly powerfull solution is to use lasers instead of black bodies. However, lasers are expensive, mid-ir components are still limited and the integration both thermally and electronically are challenging. Integration on silicon is certainly a solution.

Keywords: Quantum cascade lasers; Silicon; Gas lasers; Sensor phenomena and characterization; Optimized production technology; Gas detectors

Domains: Engineering Sciences [physics]

Mathieu Carras, Mickael Brun, Jean-Marc Fedeli, Jean-Guillaume Coutard, Laurent Duraffourg, et al.. Quantum Cascade Laser Integration on Silicon for Gas Sensing. 2018 IEEE Photonics Society Summer Topical Meeting Series (SUM), Jul 2018, Waikoloa, United States. pp.233-234, ⟨10.1109/PHOSST.2018.8456789⟩. ⟨cea-02184650⟩