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Quantum Cascade Laser Integration on Silicon for Gas Sensing

Mathieu Carras 1 Mickael Brun 1 Jean-Marc Fedeli 2 Jean-Guillaume Coutard 2 Laurent Duraffourg 2 Grégory Maisons 1 Guillaume Aoust 1 Sergio Nicoletti 2 Johan Abautret 1
1 MirSense
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
Abstract : Mir IR sensors are a preferred technical solution for many gas sensing applications. Non dispersive infrared is the most economical solution. However, it is limited in terms of sensitivity (>10ppm) and in terms of components because of strong interfering ones. A particularly powerfull solution is to use lasers instead of black bodies. However, lasers are expensive, mid-ir components are still limited and the integration both thermally and electronically are challenging. Integration on silicon is certainly a solution.
Keywords : Quantum cascade lasers Silicon Gas lasers Sensor phenomena and characterization Optimized production technology Gas detectors
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https://hal-cea.archives-ouvertes.fr/cea-02184650
Contributor : Marianne Leriche <>
Submitted on : Tuesday, July 16, 2019 - 11:16:14 AM
Last modification on : Thursday, June 11, 2020 - 5:04:08 PM

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Mathieu Carras, Mickael Brun, Jean-Marc Fedeli, Jean-Guillaume Coutard, Laurent Duraffourg, et al.. Quantum Cascade Laser Integration on Silicon for Gas Sensing. 2018 IEEE Photonics Society Summer Topical Meeting Series (SUM), Jul 2018, Waikoloa, United States. pp.233-234, ⟨10.1109/PHOSST.2018.8456789⟩. ⟨cea-02184650⟩

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