High-performance silver-dielectric interference filters for RGBIR imaging

Abstract : New architectures of interference silver-dielectric multilayer filters inspired from induced transmission designs are investigated with the prospect of high-performance red-greenblue (RGB) complementary metal oxide semiconductor imaging. The optimized designs provide combined colorimetric, signal-to-noise ratio and sensitivity performances similar to the traditional organic color filters, but without the equirement of an external infrared (IR)-cut filter, which enables the integration of additional channels such as white or IR, in addition to RGB. Due to the sub-micrometer thickness of the stacks, this is a unique solution for fully integrated, high-performance multispectral filters patterned in very small pixels. The concept is demonstrated by a wafer-scale prototype with RGBIR filters patterned down to 1.4 mu m adjacent pixels with up to 80% transmission.
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Journal articles
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https://hal-cea.archives-ouvertes.fr/cea-02184517
Contributor : Marianne Leriche <>
Submitted on : Tuesday, July 16, 2019 - 10:24:39 AM
Last modification on : Thursday, July 18, 2019 - 1:27:52 AM

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Laurent Frey, Lilian Masarotto, Loubna El Melhaoui, Sophie Verrun, Stéphane Minoret, et al.. High-performance silver-dielectric interference filters for RGBIR imaging. Optics Letters, Optical Society of America, 2018, 43 (6), pp.1355. ⟨10.1364/OL.43.001355⟩. ⟨cea-02184517⟩

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