Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method

Jason Mak; Quentin Wilmart; Ségolène Olivier; Sylvie Menezo; Joyce Poon

Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method

Jason Mak ¹ Quentin Wilmart ² Ségolène Olivier ² Sylvie Menezo ² Joyce Poon ¹

2 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information

Abstract : Silicon nitride-on-silicon bi-layer grating couplers were designed for the O-band using an optimization-based procedure that accounted for design rules and fabricated on a 200 mm wafer. The designs were sufficiently robust to fabrication variations to function well across the wafer. A peak fiber-to-chip coupling efficiency to standard single mode fiber of -2.2 dB and a 1-dB bandwidth of 72.9 nm was achieved in the representative device. Over several chips across the wafer, we measured a median peak coupling efficiency of -2.1 dB and median 1-dB bandwidth of 70.8 nm. The measurements had good correspondence with simulation.

Document type :

Journal articles

Domain :

Engineering Sciences [physics]

Complete list of metadatas

https://hal-cea.archives-ouvertes.fr/cea-02184493
Contributor : Marianne Leriche <>
Submitted on : Tuesday, July 16, 2019 - 10:11:52 AM
Last modification on : Thursday, July 18, 2019 - 1:27:53 AM

Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method

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Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method

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