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Journal articles
Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method
Abstract : Silicon nitride-on-silicon bi-layer grating couplers were designed for the O-band using an optimization-based procedure that accounted for design rules and fabricated on a 200 mm wafer. The designs were sufficiently robust to fabrication variations to function well across the wafer. A peak fiber-to-chip coupling efficiency to standard single mode fiber of -2.2 dB and a 1-dB bandwidth of 72.9 nm was achieved in the representative device. Over several chips across the wafer, we measured a median peak coupling efficiency of -2.1 dB and median 1-dB bandwidth of 70.8 nm. The measurements had good correspondence with simulation.
https://hal-cea.archives-ouvertes.fr/cea-02184493
Contributor : Marianne Leriche <>
Submitted on : Tuesday, July 16, 2019 - 10:11:52 AM
Last modification on : Tuesday, October 6, 2020 - 4:30:49 PM
Contributor : Marianne Leriche <>
Submitted on : Tuesday, July 16, 2019 - 10:11:52 AM
Last modification on : Tuesday, October 6, 2020 - 4:30:49 PM
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