Resonant optical microcavity based on crystalline silicon active layer

M. Zelsmann (1) , E. Picard (2) , T. Charvolin (3) , B. Dal’zotto , M. Nier , C. Seassal (4) , P. Rojo-Romeo (5) , X. Letartre (4) , D. Sotta (6) , Emmanuel Hadji (2) , N. Magnea (2) , E. Delamadeleine (2) , P. Besson , P. Renard (7) , H. Moriceau (8)

1 LTM - Laboratoire des technologies de la microélectronique
2 SiNaps - Silicon Nanoelectronics Photonics and Structures
3 INAC - Institut Nanosciences et Cryogénie
4 INL - Photonique - INL - Nanophotonique
5 INL - H&N - INL - Hétéroepitaxie et Nanostructures
6 SOITEC SA
7 Centre Hospitalier Victor Dupouy
8 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Domains: Physics [physics]; Condensed Matter [cond-mat]; Materials Science [cond-mat.mtrl-sci]; Physics [physics]; Physics [physics]; Optics [physics.optics]; Engineering Sciences [physics]; Electromagnetism; Engineering Sciences [physics]; Materials; Engineering Sciences [physics]; Optics / Photonic; Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics; Engineering Sciences [physics]; Electronics

M. Zelsmann, E. Picard, T. Charvolin, B. Dal’zotto, M. Nier, et al.. Resonant optical microcavity based on crystalline silicon active layer. Journal of Applied Physics, 2002, 92 (4), pp.2207-2209. ⟨cea-01996938⟩