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Advanced micro-supercapacitors based on silicon nanostructures: towards fully integrated all solid on-chip electrochemical double layer capacitors

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Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci] Engineering Sciences [physics] Electric power Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics Engineering Sciences [physics] Materials

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https://hal-cea.archives-ouvertes.fr/cea-01994402

Submitted on : Friday, January 25, 2019-2:14:35 PM

Last modification on : Tuesday, February 7, 2023-2:45:02 PM

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cea-01994402 , version 1 (25-01-2019)

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  • HAL Id : cea-01994402 , version 1

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Dorian Gaboriau, Mylène Brachet, David Aradilla, Gérard Bidan, Jean Le Bideau, et al.. Advanced micro-supercapacitors based on silicon nanostructures: towards fully integrated all solid on-chip electrochemical double layer capacitors. MRS Spring meeting, Apr 2016, phoenix, United States. ⟨cea-01994402⟩

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