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On ship integration of High-performance Micropseudocapacitors based on Silicon nanotrees coated by transition metal oxides and high-k dielectrics

Anthony Valero 1 Dorian Gaboriau 1 P. Gentile 2 Saïd Sadki 1, 3
1 STEP - Synthèse, Structure et Propriétés de Matériaux Fonctionnels
SYMMES - SYstèmes Moléculaires et nanoMatériaux pour l’Energie et la Santé : DRF/IRIG/SYMMES
2 SiNaps - Silicon Nanoelectronics Photonics and Structures
PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS : DRF/IRIG/PHELIQS
3 UGA [2016-2019] - Université Grenoble Alpes [2016-2019]
Keywords : High-k Transition metal oxides Silicon nanotrees Micropseudocapacitors
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Poster communications
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Submitted on : Friday, January 25, 2019 - 11:03:32 AM
Last modification on : Tuesday, May 11, 2021 - 11:36:32 AM
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Anthony Valero, Dorian Gaboriau, P. Gentile, Saïd Sadki. On ship integration of High-performance Micropseudocapacitors based on Silicon nanotrees coated by transition metal oxides and high-k dielectrics. E-MRS 2017 spring, May 2017, Strasbourg, France. ⟨cea-01993924⟩

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