On ship integration of High-performance Micropseudocapacitors based on Silicon nanotrees coated by transition metal oxides and high-k dielectrics

Anthony A Valero (1) , Dorian Gaboriau (1) , P. Gentile (2) , Saïd Sadki (1, 3)

1 STEP - Synthèse, Structure et Propriétés de Matériaux Fonctionnels
2 SiNaps - Silicon Nanoelectronics Photonics and Structures
3 UGA [2016-2019] - Université Grenoble Alpes [2016-2019]

Mots clés: Micropseudocapacitors; Silicon nanotrees; Transition metal oxides; High-k

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Energie électrique; Micro et nanotechnologies/Microélectronique; Matériaux

Anthony A Valero, Dorian Gaboriau, P. Gentile, Saïd Sadki. On ship integration of High-performance Micropseudocapacitors based on Silicon nanotrees coated by transition metal oxides and high-k dielectrics. E-MRS 2017 spring, May 2017, Strasbourg, France. ⟨cea-01993924⟩