Atomic Layer Deposition of Alumina on Silicon Nanotrees, towards the development of 3D ultrastable Aqueous Si Microsupercapacitor

Anthony Valero; Dorian Gaboriau; P. Gentile; Saïd Sadki

Atomic Layer Deposition of Alumina on Silicon Nanotrees, towards the development of 3D ultrastable Aqueous Si Microsupercapacitor

Anthony Valero ^{1, 2, *} Dorian Gaboriau ^{3, 2} P. Gentile ² Saïd Sadki ^{3, 4}

* Corresponding author

1 STEP - Synthèse, Structure et Propriétés de Matériaux Fonctionnels

SYMMES - SYstèmes Moléculaires et nanoMatériaux pour l’Energie et la Santé : DRF/INAC/SYMMES

2 SiNaps - Silicon Nanoelectronics Photonics and Structures

PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS : DRF/INAC/PHELIQS

3 LEMOH - Laboratoire d'Electronique Moléculaire Organique et Hybride

SYMMES - SYstèmes Moléculaires et nanoMatériaux pour l’Energie et la Santé : DRF/INAC/SYMMES

4 UGA - Université Grenoble Alpes

Keywords : PEDOT-PSS aqueous electrolytes High-k dielectrics Silicon nanotrees Microsupercapacitors

Document type :

Conference papers

Domain :

Physics [physics] / Condensed Matter [cond-mat] / Materials Science [cond-mat.mtrl-sci]

Engineering Sciences [physics] / Electric power

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Engineering Sciences [physics] / Materials

Complete list of metadatas

Cited literature [4 references] Display Hide Download

https://hal-cea.archives-ouvertes.fr/cea-01993877
Contributor : Pascal Gentile <>
Submitted on : Friday, January 25, 2019 - 11:06:40 AM
Last modification on : Wednesday, June 26, 2019 - 3:26:03 PM
Long-term archiving on : Friday, April 26, 2019 - 12:36:59 PM

AbstractECS.pdf

Files produced by the author(s)

Atomic Layer Deposition of Alumina on Silicon Nanotrees, towards the development of 3D ultrastable Aqueous Si Microsupercapacitor

File

Identifiers

Collections

Citation

Export

Metrics

13

8

Contact

Atomic Layer Deposition of Alumina on Silicon Nanotrees, towards the development of 3D ultrastable Aqueous Si Microsupercapacitor

File

Identifiers

Collections

Citation

Export

Share

Metrics

13

8

Contact