Atomic Layer Deposition of Alumina on Silicon Nanotrees, towards the development of 3D ultrastable Aqueous Si Microsupercapacitor

Anthony Valero 1, 2, * Dorian Gaboriau 3, 2 P. Gentile 2 Saïd Sadki 3, 4
* Corresponding author
1 STEP - Synthèse, Structure et Propriétés de Matériaux Fonctionnels
SYMMES - SYstèmes Moléculaires et nanoMatériaux pour l’Energie et la Santé : DRF/IRIG/SYMMES
2 SiNaps - Silicon Nanoelectronics Photonics and Structures
PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS : DRF/IRIG/PHELIQS
3 LEMOH - Laboratoire d'Electronique Moléculaire Organique et Hybride
SYMMES - SYstèmes Moléculaires et nanoMatériaux pour l’Energie et la Santé : DRF/INAC/SYMMES
4 UGA - Université Grenoble Alpes
Keywords : PEDOT-PSS aqueous electrolytes High-k dielectrics Silicon nanotrees Microsupercapacitors
Document type :
Conference papers
Complete list of metadatas

Cited literature [4 references]  Display  Hide  Download
https://hal-cea.archives-ouvertes.fr/cea-01993877
Contributor : Pascal Gentile <>
Submitted on : Friday, January 25, 2019 - 11:06:40 AM
Last modification on : Tuesday, November 5, 2019 - 2:32:14 PM
Long-term archiving on : Friday, April 26, 2019 - 12:36:59 PM

File

AbstractECS.pdf
Files produced by the author(s)

Identifiers

  • HAL Id : cea-01993877, version 1

Collections

CEA | CNRS | INAC-SP2M | CEA-DRF | UGA | IRIG | CEA-GRE

Citation

Anthony Valero, Dorian Gaboriau, P. Gentile, Saïd Sadki. Atomic Layer Deposition of Alumina on Silicon Nanotrees, towards the development of 3D ultrastable Aqueous Si Microsupercapacitor. 233rd ECS MEETING, May 2018, Seattle, WA, United States. ⟨cea-01993877⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

17

Files downloads

9

Contact

CCSD