Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

J. -B. Jager (1, 2) , P. Noe (3) , E. Picard (4) , E. Delamadeleine (1) , V. Calvo (1)

1 SiNaps - Silicon Nanoelectronics Photonics and Structures
2 PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS
3 DPFT - Département Plate-Forme Technologique
4 IETR - Institut d'Electronique et de Télécommunications de Rennes

Domains: Micro and nanotechnologies/Microelectronics; Optics / Photonic; Materials

J. -B. Jager, P. Noe, E. Picard, E. Delamadeleine, V. Calvo. Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip. 2009 11th International Conference on Transparent Optical Networks (ICTON), Jun 2009, Ponta Delgada, France. pp.1-3. ⟨cea-01993638⟩