Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

J. -B. Jager (1, 2) , P. Noe (3, 1) , E. Picard (4) , E. Delamadeleine (1) , V. Calvo (1)

1 SiNaps - Silicon Nanoelectronics Photonics and Structures
2 PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS
3 DPFT - Département Plate-Forme Technologique
4 IETR - Institut d'Electronique et de Télécommunications de Rennes

Keywords: microtoroids; silica; on chip; whispering gallery modes; silicon; 1.55µm

Domains: Micro and nanotechnologies/Microelectronics; Optics / Photonic; Materials

J. -B. Jager, P. Noe, E. Picard, E. Delamadeleine, V. Calvo. Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip. 2009 11th International Conference on Transparent Optical Networks (ICTON), Jun 2009, Ponta Delgada, France. pp.1-3, ⟨10.1109/ICTON.2009.5185174⟩. ⟨cea-01993631⟩