Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip

J.B. Jager (1, 2) , P. Noe (3) , E. Picard (4) , V. Calvo (1, 2) , E. Delamadeleine (1, 2) , E. Hadji

1 SiNaps - Silicon Nanoelectronics Photonics and Structures
2 PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS
3 CERMAV - Centre de Recherches sur les Macromolécules Végétales
4 IETR - Institut d'Electronique et de Télécommunications de Rennes

We report the fabrication process of ultrahigh-Q toroidal microcavities (10–50 μm diameter) and integration of erbium-doped silicon-rich oxide thin film inside these structures. The microcavities are studied by micro-photoluminescence and show the presence of whispering gallery modes at room temperature. Quality factors as high as 3000 are measured, limited by the setup resolution.

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics; Engineering Sciences [physics]; Optics / Photonic; Engineering Sciences [physics]; Materials

J.B. Jager, P. Noe, E. Picard, V. Calvo, E. Delamadeleine, et al.. Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip. Physica E: Low-dimensional Systems and Nanostructures, 2009, 41 (6), pp.1127-1129. ⟨10.1016/j.physe.2008.08.011⟩. ⟨cea-01991976⟩