Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip
Abstract
We report the fabrication process of ultrahigh-Q toroidal microcavities (10–50 μm diameter) and integration of erbium-doped silicon-rich oxide thin film inside these structures. The microcavities are studied by micro-photoluminescence and show the presence of whispering gallery modes at room temperature. Quality factors as high as 3000 are measured, limited by the setup resolution.