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Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip

Abstract : We report the fabrication process of ultrahigh-Q toroidal microcavities (10–50 μm diameter) and integration of erbium-doped silicon-rich oxide thin film inside these structures. The microcavities are studied by micro-photoluminescence and show the presence of whispering gallery modes at room temperature. Quality factors as high as 3000 are measured, limited by the setup resolution.
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https://hal-cea.archives-ouvertes.fr/cea-01991976
Contributor : Jean-Baptiste Jager <>
Submitted on : Thursday, January 24, 2019 - 11:00:58 AM
Last modification on : Monday, October 5, 2020 - 9:44:04 AM

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J.B. Jager, P. Noe, E. Picard, V. Calvo, E. Delamadeleine, et al.. Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip. Physica E: Low-dimensional Systems and Nanostructures, Elsevier, 2009, 41 (6), pp.1127-1129. ⟨10.1016/j.physe.2008.08.011⟩. ⟨cea-01991976⟩

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