Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip

J.B. Jager; P. Noe; E. Picard; V. Calvo; E. Delamadeleine; E. Hadji

doi:10.1016/j.physe.2008.08.011

Journal articles

Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip

J.B. Jager ^{1, 2} P. Noe ³ E. Picard ⁴ V. Calvo ^{1, 2} E. Delamadeleine ^{1, 2} E. Hadji

1 SiNaps - Silicon Nanoelectronics Photonics and Structures

PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS : DRF/IRIG/PHELIQS

2 PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS

3 CERMAV - Centre de Recherches sur les Macromolécules Végétales

4 IETR - Institut d'Electronique et de Télécommunications de Rennes

Abstract : We report the fabrication process of ultrahigh-Q toroidal microcavities (10–50 μm diameter) and integration of erbium-doped silicon-rich oxide thin film inside these structures. The microcavities are studied by micro-photoluminescence and show the presence of whispering gallery modes at room temperature. Quality factors as high as 3000 are measured, limited by the setup resolution.

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Engineering Sciences [physics] / Optics / Photonic

Engineering Sciences [physics] / Materials

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https://hal-cea.archives-ouvertes.fr/cea-01991976
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Submitted on : Thursday, January 24, 2019 - 11:00:58 AM
Last modification on : Thursday, December 2, 2021 - 2:14:12 PM

Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip

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Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip

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