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Journal Articles Physica E: Low-dimensional Systems and Nanostructures Year : 2009

Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip

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Abstract

We report the fabrication process of ultrahigh-Q toroidal microcavities (10–50 μm diameter) and integration of erbium-doped silicon-rich oxide thin film inside these structures. The microcavities are studied by micro-photoluminescence and show the presence of whispering gallery modes at room temperature. Quality factors as high as 3000 are measured, limited by the setup resolution.
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Dates and versions

cea-01991976 , version 1 (24-01-2019)

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J.B. Jager, P. Noe, E. Picard, V. Calvo, E. Delamadeleine, et al.. Whispering gallery modes in Er-doped silicon-rich oxide toroidal microcavities on chip. Physica E: Low-dimensional Systems and Nanostructures, 2009, 41 (6), pp.1127-1129. ⟨10.1016/j.physe.2008.08.011⟩. ⟨cea-01991976⟩
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