Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

J. Jager; P. Noe; E. Picard; E. Delamadeleine; V. Calvo

doi:10.1109/ICTON.2009.5185174

Conference papers

Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

J. Jager ^{1, 2} P. Noe ³ E. Picard ⁴ E. Delamadeleine ^{1, 2} V. Calvo ^{1, 2}

1 SiNaps - Silicon Nanoelectronics Photonics and Structures

PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS : DRF/IRIG/PHELIQS

2 PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS

3 CERMAV - Centre de Recherches sur les Macromolécules Végétales

4 IETR - Institut d'Electronique et de Télécommunications de Rennes

Abstract : The fabrication process of Ultrahigh-Q toroidal microcavities and integration of erbium-doped silicon-rich oxide thin film inside these structures are reported. Using micro-photoluminescence setup, we achieve selective detection of whispering gallery modes at room temperature. Quality factors as high as 3200 are measured, limited by the setup resolution.

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Engineering Sciences [physics] / Optics / Photonic

Engineering Sciences [physics] / Materials

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https://hal-cea.archives-ouvertes.fr/cea-01991966
Contributor : Jean-Baptiste Jager <>
Submitted on : Thursday, January 24, 2019 - 10:54:58 AM
Last modification on : Tuesday, May 11, 2021 - 11:36:35 AM

Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

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Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

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