Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

J. Jager (1, 2) , P. Noe (3) , E. Picard (4) , E. Delamadeleine (1, 2) , V. Calvo (1, 2)

1 SiNaps - Silicon Nanoelectronics Photonics and Structures
2 PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS
3 CERMAV - Centre de Recherches sur les Macromolécules Végétales
4 IETR - Institut d'Electronique et de Télécommunications de Rennes

The fabrication process of Ultrahigh-Q toroidal microcavities and integration of erbium-doped silicon-rich oxide thin film inside these structures are reported. Using micro-photoluminescence setup, we achieve selective detection of whispering gallery modes at room temperature. Quality factors as high as 3200 are measured, limited by the setup resolution.

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics; Engineering Sciences [physics]; Optics / Photonic; Engineering Sciences [physics]; Materials

J. Jager, P. Noe, E. Picard, E. Delamadeleine, V. Calvo. Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip. 2009 11th International Conference on Transparent Optical Networks (ICTON), Jun 2009, Ponta Delgada, Portugal. pp.1-3, ⟨10.1109/ICTON.2009.5185174⟩. ⟨cea-01991966⟩