Carrier scattering by workfunction fluctuations and interface dipoles in high-κ/metal gate stacks

Zaiping Zeng 1 Francois Triozon 2 Yann-Michel Niquet 1, *
* Corresponding author
1 LSIM - Laboratory of Atomistic Simulation
MEM - Modélisation et Exploration des Matériaux : DRF/INAC/MEM
Abstract : The introduction of a high-κ/metal gate stack in metal-oxide-Semiconductor field-effect transistors can cause a significant degradation of the mobility, especially at weak inversion densities. This degradation is commonly ascribed to remote Coulomb scattering (RCS, i.e., charges trapped at the SiO$_2$/HfO$_2$ interface). However, very large densities of RCS charges are usually needed to reproduce the experimental data. In this work, we explore alternative scattering mechanisms by quantum calculations of the carrier mobilities. We consider, in particular, metal grain workfunction fluctuations and local dipoles at the SiO$_2$/HfO$_2$ interface. Similarly to RCS, both scattering mechanisms are found to reduce the carrier mobility significantly at low carrier densities. However, the mobility exhibits a different dependence on the thickness of high-κ layer, which provides a way to identify the dominant mechanism.
Document type :
Conference papers
Complete list of metadatas

Cited literature [15 references]  Display  Hide  Download

https://hal-cea.archives-ouvertes.fr/cea-01973705
Contributor : Sylvain Barraud <>
Submitted on : Tuesday, January 8, 2019 - 2:29:59 PM
Last modification on : Tuesday, June 4, 2019 - 1:07:36 AM

File

4-Zeng2_SISPAD2016_final.pdf
Files produced by the author(s)

Identifiers

Collections

Citation

Zaiping Zeng, Francois Triozon, Yann-Michel Niquet. Carrier scattering by workfunction fluctuations and interface dipoles in high-κ/metal gate stacks. 2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2016), Sep 2016, Nuremberg, Germany. ⟨10.1109/SISPAD.2016.7605223⟩. ⟨cea-01973705⟩

Share

Metrics

Record views

47

Files downloads

68