High and low-field contact Resistances in Trigate Devices in a Non-Equilibrium Green's Functions Framework

L Bourdet (1) , Jing Li (1) , J Pelloux-Prayer (2) , F. Triozon (2) , M. Cassé (2) , S. Barraud (2) , S. Martinie (2) , D. Rideau (3) , Y.-M Niquet (1)

1 LSIM - Laboratory of Atomistic Simulation
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
3 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Sciences de l'ingénieur [physics]

L Bourdet, Jing Li, J Pelloux-Prayer, F. Triozon, M. Cassé, et al.. High and low-field contact Resistances in Trigate Devices in a Non-Equilibrium Green's Functions Framework. 2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2016), Sep 2016, Nuremberg, Germany. ⟨10.1109/SISPAD.2016.7605204⟩. ⟨cea-01973687⟩